微机电系统硅振荡加速度计和读出电路
[Xu, Yong Ping]
TN4
9788770220453 USD114.0
River Publishers
2019-01-15
Hardback
inertial sensors/ micro electro/micromechanical systems/ mems accelerometer/ mems oscillating accelerometer/ mems resonant accelerometer/ readout circuit/ mems interface/ front/end amplifier/ phase noise/ frequency/to/digital converter/ mems seismic senso