2022年碳化硅及相关材料国际会议Icscrm 2022:基于2022年第19届碳化硅及相关材料国际会议(ICSCRM)摘要的同行评审扩展文章精选
[Juraj Marek]
TB3
9783036401676 EUR320.0
Trans Tech Publications
2023-06-01
Paperback
Silicon carbide/ epitaxial growth/ wafer/ chemical vapor deposition/ dislocation/ basal plane dislocation/ etching/ thin film/ crystal/ implantation/ doping/ passivation/ laser annealing/ substrate/ electrical properties/ star/defect/ point defect/ defect inspection/ mosfet/ jfet/ diode/ integrated circuit/ high power device/ schottky diode/ reliability